New algorithm of white-light phase shifting interferometry pursing higher repeatability by using numerical phase error correction schemes of pre-processor, main processor, and post-processor
저자
JH Kim, SW Yoon, JH Lee, WJ Ahn, HJ Pahk
저널 정보
Optics and Lasers in Engineering, Vol. 46, No. 2, 2008, pp. 140-148
