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Volumetric thin film thickness measurement using spectroscopic imaging reflectometer and compensation of reflectance modeling error

저자

Kwangrak Kim, Seongryong Kim, Soonyang Kwon, Heui Jae Pahk

저널 정보

International Journal of Precision Engineering and Manufacturing, Vol. 15, No. 9, 2014, pp. 1817-1822

출간연도

2014