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Thickness and Surface Measurement of Transparent Thin-Film Layers using White Light Scanning Interferometry Combined with Reflectometry

저자

Taeyong Jo, KwangRak Kim, SeongRyong Kim, HeuiJae Pahk

저널 정보

Journal of the Optical Society of Korea Vol. 18, No. 3, 2014, pp. 236-243

출간연도

2014