Accurate Roughness Measurement Using a Method for Evaluation and Interpolation of the Validity of Height Data from a Scanning White-light Interferometer
저자
Namyoon Kim, Seung Woo Lee, Yongjun I, Heui-Jae Pahk
저널 정보
Current Optics and Photonics Vol. 1, No. 6, 2017, pp. 604-612
