A new method of noncontact measurement for 3D micro pattern in semiconductor wafer: implementing a new optical probe
International Journal of Machine Tools and Manufacture, 2001 HJ Pahk, WJ Ahn
저자
HJ Pahk, WJ Ahn
저널 정보
International Journal of Machine Tools and Manufacture, Vol. 41, No. 13-14, 2001, pp. 2031-2037
출간연도
2001
A new method of noncontact measurement for 3D micro pattern in semiconductor wafer: implementing a new optical probe
International Journal of Machine Tools and Manufacture, 2001 HJ Pahk, WJ Ahn