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서울대학교

박희재 명예교수Heui Jae Pahk, Professor Emeritus

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A Method for Improving Resolution and Critical Dimension Measurement of an Organic Layer Using Deep Learning Superresolution

저자

S Kim, HJ Pahk

저널 정보

Current Optics and Photonics , Vol. 2, No. 2, 2018, pp. 153-164

출간연도

22018

링크

https://opg.optica.org/directpdfaccess/acf162d5-dacd-4ae6-9af028a8e889347b_386110/copp-2-2-153.pdf?da=1&id=386110&seq=0&mobile=no

A Method for Improving Resolution and Critical Dimension Measurement of an Organic Layer Using Deep Learning Superresolution
Kim, SangYoon, 박희재