A New Method of Noncontact Measurement for 3D Microtopography in Semiconductor Wafer Implementing a New Optical Probe based on the Precision Defocus Measurement
저자
박희재, 안우정
저널 정보
한국정밀공학회지, Vol. 17, No. 1, 2000, pp. 129-137
출간연도
2000
A New Method of Noncontact Measurement for 3D Microtopography in Semiconductor Wafer Implementing a New Optical Probe based on the Precision Defocus Measurement