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Heui Jae Pahk, Professor Emeritus
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67. Ultrasonic Precision Machining and Measurement System
주최
KRF, 1998.12-1999.11, Investigator
기간
참가자
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이전
66. Ultra Precision Positioning System using the Circular Hinge based Piezo Actuator and Dual Servo Control Loop
다음
68. Local Environmental Control Cell for Ultra Precision Processing/Inspection Process toward Semiconductor Manufacture
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